- 专利标题: Resistive random access memory devices and methods for forming the same
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申请号: US16683467申请日: 2019-11-14
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公开(公告)号: US11289541B2公开(公告)日: 2022-03-29
- 发明人: Frederick Chen
- 申请人: Winbond Electronics Corp.
- 申请人地址: TW Taichung
- 专利权人: Winbond Electronics Corp.
- 当前专利权人: Winbond Electronics Corp.
- 当前专利权人地址: TW Taichung
- 代理机构: Muncy, Geissler, Olds & Lowe, PC
- 主分类号: H01L27/24
- IPC分类号: H01L27/24 ; H01L45/00 ; H01L29/08 ; H01L29/10 ; H01L29/417 ; H01L29/78 ; H01L21/265 ; H01L21/306 ; H01L21/74 ; H01L29/66
摘要:
A resistive random access memory (RRAM) device is provided. The RRAM device includes a gate structure on a substrate, and a source region and a drain region disposed on opposite sides of the gate structure on the substrate. The source region includes a semiconductor bulk, and the drain region includes a plurality of semiconductor fins adjacent to the semiconductor bulk, wherein the semiconductor fins are separated from each other by an isolation layer. The RRAM device further includes a plurality of RRAM units, wherein each of the RRAM units electrically contacts one of the semiconductor fins.
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