Invention Grant
- Patent Title: Precision structured glass article having EMI shielding and methods for making the same
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Application No.: US17043567Application Date: 2019-04-03
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Publication No.: US11296038B2Publication Date: 2022-04-05
- Inventor: Jin Su Kim , Dean Michael Thelen
- Applicant: CORNING INCORPORATED
- Applicant Address: US NY Corning
- Assignee: CORNING INCORPORATED
- Current Assignee: CORNING INCORPORATED
- Current Assignee Address: US NY Corning
- International Application: PCT/US2019/025525 WO 20190403
- International Announcement: WO2019/195385 WO 20191010
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L23/552 ; H01L21/48

Abstract:
Structured glass articles include a glass substrate including a glass cladding layer fused to a glass core layer, a cavity formed in the glass substrate, and a shielding layer disposed within the cavity. In some embodiments, a passivation layer is disposed within the cavity such that the shielding layer is between the passivation layer and the glass substrate. A method for forming a glass fan-out includes depositing a shielding layer within a cavity in a glass substrate. The glass substrate includes a glass cladding layer fused to a glass core layer. A silicon chip may be deposited within the cavity. In some embodiments, the method also includes depositing a passivation layer within the cavity such that the shielding layer is between the passivation layer and the glass substrate.
Public/Granted literature
- US20210125938A1 PRECISION STRUCTURED GLASS ARTICLE HAVING EMI SHIELDING AND METHODS FOR MAKING THE SAME Public/Granted day:2021-04-29
Information query
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