Invention Grant
- Patent Title: Semiconductor device and method of forming the same
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Application No.: US16727673Application Date: 2019-12-26
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Publication No.: US11296116B2Publication Date: 2022-04-05
- Inventor: Fu-Chen Chang , Kuo-Chi Tu , Tzu-Yu Chen , Sheng-Hung Shih
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Maschoff Brennan
- Main IPC: H01L27/11
- IPC: H01L27/11 ; H01L27/1159 ; H01L27/11587 ; G11C11/22 ; H01L49/02 ; H01L27/11507 ; H01L27/11502

Abstract:
A semiconductor device includes an inter-metal dielectric layer, a first conductive line, and a first ferroelectric random access memory (FRAM) structure. The first conductive line is embedded in the inter-metal dielectric layer and extends along a first direction. The first FRAM structure is over inter-metal dielectric layer and includes a bottom electrode layer, a ferroelectric layer, and a top electrode layer. The bottom electrode layer is over the first conductive line and has an U-shaped when viewed in a cross section taken along a second direction substantially perpendicular to the first direction. The ferroelectric layer is conformally formed on the bottom electrode. The top electrode layer is over the ferroelectric layer.
Public/Granted literature
- US20210202502A1 SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME Public/Granted day:2021-07-01
Information query
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