A via structure and methods for forming a via structure generally includes a via opening in a dielectric layer. A conformal barrier layer is in the via opening; and a conductive metal on the barrier layer in the via opening. The conductive metal includes a recessed top surface. A conductive planarization stop layer is on the recessed top surface and extends about a shoulder portion formed in the dielectric layer, wherein the shoulder portion extends about a perimeter of the via opening. A fill material including an insulator material or a conductor material is on the conductive planarization stop layer within the recessed top surface, wherein the conductive planarization stop layer on the shoulder portion is coplanar to the insulator material or the conductor material. Also described are methods of fabricating the via structure.