Invention Grant
- Patent Title: Manufacturing method of via-hole connection structure, array substrate and manufacturing method thereof, display device and manufacturing method thereof
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Application No.: US16473950Application Date: 2018-12-26
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Publication No.: US11302869B2Publication Date: 2022-04-12
- Inventor: Pengcheng Lu , Xiaochuan Chen , Shengji Yang , Kuanta Huang , Hui Wang , Yanming Wang , Weihai Wang , Guohong Qin , Yage Song , Jiantong Li
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Collard & Roe, P.C.
- Priority: CN201810428335.1 20180507
- International Application: PCT/CN2018/123956 WO 20181226
- International Announcement: WO2019/214253 WO 20191114
- Main IPC: H01L51/52
- IPC: H01L51/52 ; H01L51/00 ; H01L27/32

Abstract:
A manufacturing method of a via-hole connection structure, a manufacturing method of an array substrate and an array substrate are provided by the embodiments of the present disclosure, and the manufacturing method of the via-hole connection structure includes: forming an insulation layer on a base substrate and forming a first via hole in the insulation layer; forming a connection portion in the first via hole; forming a protection layer covering the connection portion on a surface of the insulation layer; forming a second via hole in the insulation layer and in the protection layer; removing at least a portion of the protection layer to expose the connection portion.
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