Invention Grant
- Patent Title: Hermetic housing comprising a getter, optoelectronic component or MEMS device incorporating such a hermetic housing and associated production method
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Application No.: US17279006Application Date: 2019-09-27
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Publication No.: US11305983B2Publication Date: 2022-04-19
- Inventor: Sylvain Lemettre , David Bunel , Johan Moulin , Alain Bosseboeuf
- Applicant: LYNRED , UNIVERSITE PARIS-SACLAY , CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
- Applicant Address: FR Palaiseau; FR Saint-Aubin; FR Paris
- Assignee: LYNRED,UNIVERSITE PARIS-SACLAY,CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
- Current Assignee: LYNRED,UNIVERSITE PARIS-SACLAY,CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
- Current Assignee Address: FR Palaiseau; FR Saint-Aubin; FR Paris
- Agency: Marshall, Gerstein & Borun LLP
- Priority: FR1860267 20181108
- International Application: PCT/EP2019/076186 WO 20190927
- International Announcement: WO2020/094292 WO 20200514
- Main IPC: B81B7/00
- IPC: B81B7/00 ; B81C1/00
Abstract:
A hermetic housing is disclosed (10a) for an optoelectronic component (11) or a MEMS device configured to form an enclosure (12) within which a low pressure or vacuum prevails. The hermetic housing includes: an optical window (14) transparent for at least one wavelength of interest (λ); and a layer of a getter material (15a) configured to capture gases present in said enclosure and deposited on the optical window opposite the enclosure. This layer of getter material has a thickness (e_t), greater than 60 nanometers, and a porosity (P) in the range from 10 to 70% to satisfy the following relation: (1−P)*e_t
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