Invention Grant
- Patent Title: Creating time-resolved emission images of integrated circuits using a single-point single-photon detector and a scanning system
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Application No.: US16559589Application Date: 2019-09-03
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Publication No.: US11307250B2Publication Date: 2022-04-19
- Inventor: Franco Stellari , Peilin Song
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Otterstedt, Wallace & Kammer, LLP
- Agent Daniel Morris
- Main IPC: G01R31/311
- IPC: G01R31/311

Abstract:
A Scanning Time-Resolved Emission (S-TRE) microscope or system includes an optical system configured to collect light from emissions of light generated by a device under test (DUT). A scanning system is configured to permit the emissions of light to be collected from positions across the DUT in accordance with a scan pattern. A timing photodetector is configured to detect a single photon or photons of the emissions of light from the particular positions across the DUT such that the emissions of light are correlated to the positions to create a time-dependent map of the emissions of light across the DUT. The scanning system is configured to update the time-dependent map of the emissions based on combinations of the emissions of light at certain locations.
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