Invention Grant
- Patent Title: Splicing nano-imprint template with repair adhesive layer, repair method of splicing seam thereof, and manufacturing method thereof
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Application No.: US16830820Application Date: 2020-03-26
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Publication No.: US11307499B2Publication Date: 2022-04-19
- Inventor: Yanhui Lu , Duohui Li , Xueyuan Zhou
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Collard & Roe, P.C.
- Priority: CN201911176775.3 20191126
- Main IPC: G03F7/20
- IPC: G03F7/20 ; B29C65/52 ; H01L21/027

Abstract:
Embodiments of the present disclosure provide a splicing nano-imprint template, a repair method of a splicing seam thereof, and a manufacturing method thereof. The repair method of the splicing seam of the splicing nano-imprint template includes: providing a splicing nano-imprint plate, in which the splicing nano-imprint plate includes a base substrate and splicing modules that are positioned on the base substrate, a splicing seam is provided between adjacent spicing modules, and each of the splicing modules includes a unit pattern; forming a repair adhesive layer at least at the splicing seam; and performing a patterning process on the repair adhesive layer to form a repair module, in which the repair module includes the unit pattern.
Public/Granted literature
- US20210157240A1 SPLICING NANO-IMPRINT TEMPLATE, REPAIR METHOD OF SPLICING SEAM THEREOF, AND MANUFACTURING METHOD THEREOF Public/Granted day:2021-05-27
Information query
IPC分类: