- 专利标题: Microwave assisted magnetic recording head slider and lapping method thereof
-
申请号: US17341553申请日: 2021-06-08
-
公开(公告)号: US11308981B2公开(公告)日: 2022-04-19
- 发明人: Shi Xiong Chen , Bin Qi , Wen Rong Guo , Peng Liu
- 申请人: SAE Magnetics (H.K.) Ltd.
- 申请人地址: CN Hong Kong
- 专利权人: SAE Magnetics (H.K.) Ltd.
- 当前专利权人: SAE Magnetics (H.K.) Ltd.
- 当前专利权人地址: CN Hong Kong
- 代理机构: Nixon & Vanderhye, P.C.
- 优先权: CN202010630434.5 20200703
- 主分类号: G11B5/31
- IPC分类号: G11B5/31 ; B24B49/00 ; G11B5/255 ; G11B5/00
摘要:
A lapping method of a MAMR head slider includes a first lapping process: controlling the lapping plate to spin at a first speed, and controlling the MAMR head slider to move at a first moving speed, and applying a first force to the MAMR head slider; and a second lapping process: controlling the lapping plate to spin at a second speed that is lower than the first speed, and controlling the MAMR head slider to move at a second moving speed that is lower than the first moving speed, and applying a second force that is lower than the first force to the MAMR head slider; and the second lapping process includes a final lapping process section, and the second force in the final lapping process being zero. In such a way, lapping marks on the ABS are reduced to improve the roughness and the reliability.
公开/授权文献
信息查询
IPC分类: