Invention Grant
- Patent Title: Vapor deposition metal mask, vapor deposition metal mask production method, and display device production method
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Application No.: US16248643Application Date: 2019-01-15
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Publication No.: US11313024B2Publication Date: 2022-04-26
- Inventor: Takehiro Nishi
- Applicant: TOPPAN PRINTING CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: TOPPAN PRINTING CO., LTD.
- Current Assignee: TOPPAN PRINTING CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Squire Patton Boggs (US) LLP
- Priority: JPJP2016-155099 20160805
- Main IPC: C23C14/04
- IPC: C23C14/04 ; C23F1/02

Abstract:
A vapor deposition metal mask includes a mask region including a plurality of mask holes. A connection portion of each mask hole located at a position other than the center of the mask region has a shape protruding inward of the mask hole along the entire circumference of the mask hole and is configured by a first section, which is a section closer to the center of the mask region and a second section, which is a section closer to one of the ends of the mask region. The distance between the first section and the reverse surface of the mask region is a first step height. The first step height in the end region is smaller than the first step height in the central region.
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