Invention Grant
- Patent Title: Die back side structures for warpage control
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Application No.: US16611830Application Date: 2017-06-30
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Publication No.: US11322456B2Publication Date: 2022-05-03
- Inventor: Feras Eid , Venkata Suresh R. Guthikonda , Shankar Devasenathipathy , Chandra M. Jha , Je-Young Chang , Kyle Yazzie , Prasanna Raghavan , Pramod Malatkar
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- International Application: PCT/US2017/040482 WO 20170630
- International Announcement: WO2019/005152 WO 20190103
- Main IPC: H05K1/18
- IPC: H05K1/18 ; H01L23/00 ; H01L21/50 ; H01L23/544 ; H01L25/065 ; H05K1/02

Abstract:
A foundation layer having a stiffener and methods of forming a stiffener are described. One or more dies are formed over the foundation layer. Each die has a front side surface that is electrically coupled to the foundation layer and a back side surface that is opposite from the front side surface. A stiffening layer (or a stiffener) is formed on the back side surface of at least one of the dies. The stiffening layer may be directly coupled to the back side surface of the one or more dies without an adhesive layer. The stiffening layer may include one or more materials, including at least one of a metal, a metal alloy, and a ceramic. The stiffening layer may be formed to reduce warpage based on the foundation layer and the dies. The one or more materials of the stiffening layer can be formed using a cold spray.
Public/Granted literature
- US20200066655A1 DIE BACK SIDE STRUCTURES FOR WARPAGE CONTROL Public/Granted day:2020-02-27
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