Invention Grant
- Patent Title: Deep generative models for optical or other mode selection
-
Application No.: US17375951Application Date: 2021-07-14
-
Publication No.: US11328410B2Publication Date: 2022-05-10
- Inventor: Bjorn Brauer
- Applicant: KLA Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA Corporation
- Current Assignee: KLA Corporation
- Current Assignee Address: US CA Milpitas
- Agent Ann Marie Mewherter
- Main IPC: G06T7/00
- IPC: G06T7/00 ; G06N3/04 ; G06F30/20

Abstract:
Methods and systems for selecting a mode of a tool used for a process performed on a specimen are provided. One system includes one or more computer subsystems and one or more components executed by the one or more computer subsystems. The one or more components include a generative adversarial network (GAN), e.g., a conditional GAN (cGAN). The computer subsystem(s) are configured for modifying a portion of design data for a specimen to generate an artificially defective portion of the design data and generating simulated images for the specimen by inputting the portion of the design data and the artificially defective portion of the design data into the GAN. The computer subsystem(s) are also configured for determining one or more characteristics of the simulated images and selecting a mode of a tool used for a process performed on the specimen based on the determined one or more characteristics.
Public/Granted literature
- US20220036539A1 DEEP GENERATIVE MODELS FOR OPTICAL OR OTHER MODE SELECTION Public/Granted day:2022-02-03
Information query