Invention Grant
- Patent Title: Semiconductor device with compact contact portion, method of manufacturing the same and electronic device including the same
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Application No.: US16966862Application Date: 2018-10-31
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Publication No.: US11329149B2Publication Date: 2022-05-10
- Inventor: Huilong Zhu
- Applicant: Institute of Microelectronics, The Chinese Academy of Sciences
- Applicant Address: CN Beijing
- Assignee: Institute of Microelectronics, The Chinese Academy of Sciences
- Current Assignee: Institute of Microelectronics, The Chinese Academy of Sciences
- Current Assignee Address: CN Beijing
- Agency: Davis Wright Tremaine LLP
- Agent Michael J. Donohue
- Priority: CN201811171548.7 20181008
- International Application: PCT/CN2018/113046 WO 20181031
- International Announcement: WO2020/073379 WO 20200416
- Main IPC: H01L29/778
- IPC: H01L29/778 ; H01L29/06 ; H01L29/417 ; H01L29/66

Abstract:
There are provided a vertical semiconductor device, a method of manufacturing the same, and an electronic device including the same. According to an embodiment, the semiconductor device may include a vertical active region disposed on a substrate and comprising a first source/drain layer, a channel layer and a second source/drain layer which are stacked in sequence; a gate stack surrounding at least a part of a periphery of the channel layer; and at least one of: a first electrical connection component for the first source/drain layer, comprising a first contact portion disposed above a top surface of the active region and a first conductive channel in contact with the first contact portion and extending from the top surface of the active region to be in contact with at least a part of sidewalls of the first source/drain layer; and a second electrical connection component for the gate stack, comprising a second contact portion disposed above the top surface of the active region and a second conductive channel in contact with the second contact portion and extending from the top surface of the active region to be in contact with at least a part of sidewalls of a gate conductor layer in the gate stack.
Public/Granted literature
- US20210043762A1 SEMICONDUCTOR DEVICE, METHOD OF MANUFACTURING THE SAME AND ELECTRONIC DEVICE INCLUDING THE SAME Public/Granted day:2021-02-11
Information query
IPC分类: