发明授权
- 专利标题: Sensing device
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申请号: US16982031申请日: 2019-03-25
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公开(公告)号: US11329210B2公开(公告)日: 2022-05-10
- 发明人: Yuki Yanagisawa , Hiroyuki Kukita
- 申请人: NIHON DEMPA KOGYO CO., LTD.
- 申请人地址: JP Tokyo
- 专利权人: NIHON DEMPA KOGYO CO., LTD.
- 当前专利权人: NIHON DEMPA KOGYO CO., LTD.
- 当前专利权人地址: JP Tokyo
- 代理机构: JCIPRNET
- 优先权: JPJP2018-062542 20180328
- 国际申请: PCT/JP2019/012525 WO 20190325
- 国际公布: WO2019/188992 WO 20191003
- 主分类号: H01L35/32
- IPC分类号: H01L35/32 ; H02N2/18 ; H03B5/32 ; G01N29/02
摘要:
A sensing device is provided. The sensing device includes a heat regulation mechanism to regulate a temperature of a piezoelectric resonator corresponding to a voltage, and uses a sensing sensor to cause a sensing object to adsorb to and desorb from the piezoelectric resonator by increase and decrease of the temperature. A drive voltage is regulated to regulate an amplification factor of a heat regulation voltage input to a drive voltage regulator that regulates the temperature of the heat regulation mechanism corresponding to the type of a sensing sensor connected to a device main body. Therefore, when a CQCM sensor that heats a crystal resonator using a heater circuit and a TQCM sensor that regulates a heat of the crystal resonator sing a Peltier element are each used, regulation ranges of the driving powers supplied to the respective heater circuit and Peltier element can be changed.
公开/授权文献
- US20210104655A1 SENSING DEVICE 公开/授权日:2021-04-08
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