Invention Grant
- Patent Title: Boolean temperature sensing using phase transition material
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Application No.: US16181972Application Date: 2018-11-06
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Publication No.: US11333558B2Publication Date: 2022-05-17
- Inventor: Vibhor Jain , Anthony K. Stamper , John J. Pekarik , Steven M. Shank
- Applicant: GLOBALFOUNDRIES U.S. Inc.
- Applicant Address: US CA Santa Clara
- Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Hoffman Warnick LLC
- Agent Francois Pagette
- Main IPC: G01K1/02
- IPC: G01K1/02 ; H01L45/00 ; G01K7/22 ; H01L27/24 ; H01L23/522 ; G01K7/16 ; H01L27/00 ; H01L23/482 ; H01L27/06

Abstract:
One device disclosed herein includes, among other things, a substrate, a first resistor comprising a first phase transition material formed above the substrate, the first phase transition material exhibiting a first dielectric phase for temperatures less than a first phase transition temperature and a first semiconductor phase for temperatures greater than the first phase transition temperature, and logic to detect a transition of the first resistor to the first semiconductor phase.
Information query