Invention Grant
- Patent Title: Method of manufacture of a capillary for a hollow-core photonic crystal fiber
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Application No.: US17088201Application Date: 2020-11-03
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Publication No.: US11333825B2Publication Date: 2022-05-17
- Inventor: Hendrik Sabert , Paulus Antonius Andreas Teunissen
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Priority: EP19207624 20191107,EP19213709 20191205
- Main IPC: C03B37/012
- IPC: C03B37/012 ; C03C15/00 ; C03C25/68 ; G02B6/02

Abstract:
A method for manufacturing a capillary usable as part of a hollow-core photonic crystal fiber. The method includes obtaining a capillary having capillary wall including a first wall thickness; and chemically etching the capillary wall to reduce the wall thickness of the capillary wall. During performance of the etching, a control parameter is locally varied along the length of the capillary, the control parameter relating to reactivity of an etchant used in the etching, so as to control the etched wall thickness of the capillary wall along the capillary length. Also disclosed is a capillary manufactured by such a method and various devices including such a capillary.
Public/Granted literature
- US20210141150A1 METHOD OF MANUFACTURE OF A CAPILLARY FOR A HOLLOW-CORE PHOTONIC CRYSTAL FIBER Public/Granted day:2021-05-13
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