- 专利标题： Fluid sensor and mass flow controller
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申请号： US16626760申请日： 2018-07-20
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公开(公告)号： US11334096B2公开(公告)日： 2022-05-17
- 发明人: Qianyi Su , Zhihui Song , Zhengtang Chen
- 申请人： BEIJING SEVENSTAR FLOW CO., LTD.
- 申请人地址： CN Beijing
- 专利权人： BEIJING SEVENSTAR FLOW CO., LTD.
- 当前专利权人： BEIJING SEVENSTAR FLOW CO., LTD.
- 当前专利权人地址： CN Beijing
- 代理机构： Ipsilon USA, LLP
- 优先权： CN201810785756.X 20180717
- 国际申请： PCT/CN2018/096495 WO 20180720
- 国际公布： WO2020/014975 WO 20200123
- 主分类号： G05D7/06
- IPC分类号： G05D7/06 ; G01F7/00 ; G05B19/416
摘要：
The present disclosure provides a fluid sensor and a mass flow controller. The fluid sensor comprises at least two measuring tubes whose diameters have a proportional relationship. The fluid sensor provided by the present disclosure can guarantee measurement accuracy in a whole measurement range and also can improve device reliability.
公开/授权文献
- US20210405664A1 FLUID SENSOR AND MASS FLOW CONTROLLER 公开/授权日：2021-12-30
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