Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US17172124Application Date: 2021-02-10
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Publication No.: US11342330B2Publication Date: 2022-05-24
- Inventor: Min Hee Cho , Hyunmog Park , Woo Bin Song , Minsu Lee , Wonsok Lee
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Muir Patent Law, PLLC
- Priority: KR10-2020-0085543 20200710
- Main IPC: H01L27/108
- IPC: H01L27/108

Abstract:
A semiconductor memory device is provided. The device may include a lower gate line provided on a substrate and extended in a first direction, an upper gate line vertically overlapped with the lower gate line and extended in the first direction, a first capacitor provided between the lower gate line and the upper gate line, a second capacitor provided between the lower gate line and the upper gate line and spaced apart from the first capacitor in the first direction, a lower semiconductor pattern provided to penetrate the lower gate line and connected to the first capacitor, an upper semiconductor pattern provided to penetrate the upper gate line and connected to the second capacitor, and a lower insulating pattern provided between the second capacitor and the lower gate line to cover the entire region of a bottom surface of the second capacitor.
Public/Granted literature
- US20220013525A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2022-01-13
Information query
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