- 专利标题: Memory device and method of manufacturing the same
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申请号: US17089286申请日: 2020-11-04
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公开(公告)号: US11342344B2公开(公告)日: 2022-05-24
- 发明人: Seungeon Moon , Bae Ho Park , Sung-Min Yoon , Seung Youl Kang , Jeong Hun Kim , Jiyong Woo , Jong Pil Im , Chansoo Yoon , Ji Hoon Jeon
- 申请人: Electronics and Telecommunications Research Institute , University-Industry Cooperation Group of Kyung Hee University
- 申请人地址: KR Daejeon; KR Yongin-si
- 专利权人: Electronics and Telecommunications Research Institute,University-Industry Cooperation Group of Kyung Hee University
- 当前专利权人: Electronics and Telecommunications Research Institute,University-Industry Cooperation Group of Kyung Hee University
- 当前专利权人地址: KR Daejeon; KR Yongin-si
- 代理机构: Rabin & Berdo, P.C.
- 优先权: KR10-2019-0140499 20191105,KR10-2020-0058889 20200518
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L27/11507 ; H01L27/11504 ; H01L49/02
摘要:
The present disclosure relates to a memory device, and more particularly, to a memory device including a substrate, a plurality of vertical structures disposed on the substrate and including insulation layers and lower electrodes, which are alternately laminated with each other, wherein the vertical structures are aligned in a first direction parallel to a top surface of the substrate and a second direction crossing the first direction, an upper electrode disposed on a top surface and side surfaces of each of the vertical structures, and a first dielectric layer disposed between the upper electrode and the vertical structures to cover the top surface and the side surfaces of each of the vertical structures. Here, the first dielectric layer includes a ferroelectric material.
公开/授权文献
- US20210134813A1 MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME 公开/授权日:2021-05-06
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