Invention Grant
- Patent Title: Memory device and method of manufacturing the same
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Application No.: US17089286Application Date: 2020-11-04
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Publication No.: US11342344B2Publication Date: 2022-05-24
- Inventor: Seungeon Moon , Bae Ho Park , Sung-Min Yoon , Seung Youl Kang , Jeong Hun Kim , Jiyong Woo , Jong Pil Im , Chansoo Yoon , Ji Hoon Jeon
- Applicant: Electronics and Telecommunications Research Institute , University-Industry Cooperation Group of Kyung Hee University
- Applicant Address: KR Daejeon; KR Yongin-si
- Assignee: Electronics and Telecommunications Research Institute,University-Industry Cooperation Group of Kyung Hee University
- Current Assignee: Electronics and Telecommunications Research Institute,University-Industry Cooperation Group of Kyung Hee University
- Current Assignee Address: KR Daejeon; KR Yongin-si
- Agency: Rabin & Berdo, P.C.
- Priority: KR10-2019-0140499 20191105,KR10-2020-0058889 20200518
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L27/11507 ; H01L27/11504 ; H01L49/02

Abstract:
The present disclosure relates to a memory device, and more particularly, to a memory device including a substrate, a plurality of vertical structures disposed on the substrate and including insulation layers and lower electrodes, which are alternately laminated with each other, wherein the vertical structures are aligned in a first direction parallel to a top surface of the substrate and a second direction crossing the first direction, an upper electrode disposed on a top surface and side surfaces of each of the vertical structures, and a first dielectric layer disposed between the upper electrode and the vertical structures to cover the top surface and the side surfaces of each of the vertical structures. Here, the first dielectric layer includes a ferroelectric material.
Public/Granted literature
- US20210134813A1 MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2021-05-06
Information query
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