- 专利标题: Fast generalized multi-wavelength ellipsometer
-
申请号: US16796648申请日: 2020-02-20
-
公开(公告)号: US11346769B2公开(公告)日: 2022-05-31
- 发明人: Alexander George Boosalis
- 申请人: Onto Innovation Inc.
- 申请人地址: US MA Wilmington
- 专利权人: Onto Innovation Inc.
- 当前专利权人: Onto Innovation Inc.
- 当前专利权人地址: US MA Wilmington
- 代理机构: Paradice and Li LLP
- 主分类号: G01N21/21
- IPC分类号: G01N21/21 ; G01J4/04
摘要:
An ellipsometer uses a broadband light source and a Fresnel cone to produce a simultaneous broadband polarization state generator with no moving parts. The detector of the ellipsometer includes a diffractive element to spatially separate the wavelengths of the light from the sample. The wavelengths may be spatially separated sufficiently that there is no overlap of bands of wavelengths when imaged by a two-dimensional sensor or may be temporally separated. Additionally, the detector separates and simultaneously analyzes the polarizations states of the light from the sample so there is no overlap of polarization states when imaged by a two-dimensional sensor and no moving parts are used. The resulting image with separated wavelengths and polarization states may be used to determine at least a partial Mueller matrix for the sample.
公开/授权文献
- US20210262921A1 FAST GENERALIZED MULTI-WAVELENGTH ELLIPSOMETER 公开/授权日:2021-08-26
信息查询