Invention Grant
- Patent Title: Extreme ultraviolet light generation apparatus, and electronic device manufacturing method
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Application No.: US17160486Application Date: 2021-01-28
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Publication No.: US11350514B2Publication Date: 2022-05-31
- Inventor: Koichiro Koge , Atsushi Ueda , Takayuki Osanai
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Priority: JPJP2020-053145 20200324
- Main IPC: H05G2/00
- IPC: H05G2/00 ; G03F7/20

Abstract:
An extreme ultraviolet light generation apparatus includes a chamber device, a concentrating mirror, an exhaust port, and a central gas supply port. The exhaust port is formed at the chamber device and is formed on the side lateral to a focal line and opposite to the reflection surface with respect to the plasma generation region. The central gas supply port is formed on the side opposite to the exhaust port with respect to the plasma generation region on the supply line passing through the exhaust port, the plasma generation region, and an inner side of a peripheral portion of the reflection surface. The central gas supply port supplies the gas toward the exhaust port along the supply line through the plasma generation region.
Public/Granted literature
- US20210307150A1 EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD Public/Granted day:2021-09-30
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