Two port mems silicon flow control valve
Abstract:
A microvalve includes a first plate having a surface defining an actuator cavity. A second plate has a surface that abuts the surface of the first plate and includes a displaceable member that is disposed within the actuator cavity for movement between a closed position, wherein the displaceable member prevents fluid communication through the microvalve, and an opened position, wherein the displaceable member does not prevent fluid communication through the microvalve. An actuator is connected to the displaceable member. The displaceable member includes a sealing portion having a plurality of elongated control arms extending inwardly from one end thereof, wherein the control arms are configured as a valve closing members for each of a plurality of fluid flow openings in the first plate.
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