Invention Grant
- Patent Title: Method of depositing material onto a surface and structure formed according to the method
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Application No.: US16867385Application Date: 2020-05-05
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Publication No.: US11355338B2Publication Date: 2022-06-07
- Inventor: Shinya Ueda
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Agency: Snell & Wilmer L.L.P.
- Main IPC: H01L21/02
- IPC: H01L21/02 ; C23C14/00 ; H01J37/32 ; C23C16/455
Abstract:
Methods of depositing material on a surface of a substrate are disclosed. The methods include exposing a surface of the substrate to a precursor within a reaction chamber to form adsorbed species on the surface and removing at least a portion of the adsorbed species prior to introducing a reactant to the reaction chamber.
Information query
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