Invention Grant
- Patent Title: Microelectronic devices including an oxide material between adjacent decks, electronic systems, and related methods
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Application No.: US16541944Application Date: 2019-08-15
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Publication No.: US11355514B2Publication Date: 2022-06-07
- Inventor: Andrew Bicksler , Wei Yeeng Ng , James C. Brighten
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: TraskBritt
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L23/535 ; H01L27/11524 ; H01L27/11556 ; H01L21/768 ; H01L23/528 ; H01L27/1157

Abstract:
A microelectronic device includes decks comprising alternating levels of a conductive material and an insulative material, the decks comprising pillars including a channel material extending through the alternating levels of the conductive material and the insulative material, a conductive contact between adjacent decks and in electrical communication with the channel material of the adjacent decks, and an oxide material between the adjacent decks, the oxide material extending between an uppermost level of a first deck and a lowermost level of a second deck adjacent to the first deck. Related electronic systems and methods of forming the microelectronic device and electronic systems are also disclosed.
Public/Granted literature
Information query
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