- 专利标题: Bonding and indexing apparatus
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申请号: US16233408申请日: 2018-12-27
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公开(公告)号: US11362058B2公开(公告)日: 2022-06-14
- 发明人: Ralph Huybers , Hans Van De Rijdt
- 申请人: NEXPERIA B.V.
- 申请人地址: NL Nijmegen
- 专利权人: NEXPERIA B.V.
- 当前专利权人: NEXPERIA B.V.
- 当前专利权人地址: NL Nijmegen
- 代理机构: Ohlandt, Greeley, Ruggiero & Perle, LLP
- 优先权: EP17210923 20171228
- 主分类号: G11C16/04
- IPC分类号: G11C16/04 ; H01L23/00 ; H01L21/683 ; B23K20/02 ; H01L21/68
摘要:
A bonding and indexing apparatus has a first index head to move a substrate in an indexing direction from a first position to a second position and a second index head to move the substrate in an indexing direction from the second position to a third position. The first and/or second index head has a bonding element to effect a bonding process between the substrate and an element disposed against the substrate so that bonding and movement in the indexing direction is implemented simultaneously by the first index head and/or bonding and movement in the indexing direction is implemented simultaneously by the second index head.
公开/授权文献
- US20190206829A1 BONDING AND INDEXING APPARATUS 公开/授权日:2019-07-04
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