- 专利标题: Image sensors with quantum efficiency enhanced by inverted pyramids
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申请号: US16777193申请日: 2020-01-30
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公开(公告)号: US11362124B2公开(公告)日: 2022-06-14
- 发明人: Alireza Bonakdar , Zhiqiang Lin , Bill Phan , Badrinath Padmanabhan
- 申请人: OmniVision Technologies, Inc.
- 申请人地址: US CA Santa Clara
- 专利权人: OmniVision Technologies, Inc.
- 当前专利权人: OmniVision Technologies, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Lathrop GPM LLP
- 主分类号: H01L27/14
- IPC分类号: H01L27/14 ; H01L27/146
摘要:
An image sensor with quantum efficiency enhanced by inverted pyramids includes a semiconductor substrate and a plurality of microlenses. The semiconductor substrate includes an array of pixels. Each of the pixels is configured to convert light incident on the pixel to an electrical output signal, the semiconductor substrate having a top surface for receiving the light. The top surface forms a plurality of inverted pyramids in each pixel. The plurality of microlenses are disposed above the top surface and aligned to the plurality of inverted pyramids, respectively.
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