Invention Grant
- Patent Title: Semiconductor device and a method for forming a semiconductor device
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Application No.: US16723742Application Date: 2019-12-20
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Publication No.: US11362195B2Publication Date: 2022-06-14
- Inventor: Shih-Hung Chen , Dimitri Linten
- Applicant: IMEC VZW
- Applicant Address: BE Leuven
- Assignee: IMEC VZW
- Current Assignee: IMEC VZW
- Current Assignee Address: BE Leuven
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- Priority: EP18248199 20181228
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66 ; H01L21/8234 ; H01L27/02 ; H01L27/088

Abstract:
A semiconductor device and a method for forming such are provided, the device including: a substrate, a plurality of parallel active semiconductor patterns that extend through a drain-side region and a source-side region, a metal drain contact in the drain-side region, an active gate pattern, a first dummy gate pattern, and a second dummy gate pattern that all extend across the active semiconductor patterns, and a metal interconnect structure located in a region between the first and the second dummy gate patterns. The active semiconductor patterns are doped with a dopant in portions exposed by the dummy gates in dummy gate regions that include the gate cut regions of the first and second dummy gate patterns. The metal interconnect structure connects each of a second subset of the active semiconductor patterns to a respective at least one of a first subset of the active semiconductor patterns.
Public/Granted literature
- US20200212199A1 Semiconductor Device and a Method for Forming a Semiconductor Device Public/Granted day:2020-07-02
Information query
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