Invention Grant
- Patent Title: Concave diffraction grating, method for producing the same, and optical device
-
Application No.: US17258818Application Date: 2019-04-24
-
Publication No.: US11366255B2Publication Date: 2022-06-21
- Inventor: Takanori Aono , Yoshisada Ebata , Kenta Yaegashi , Shigeru Matsui
- Applicant: HITACHI HIGH-TECH CORPORATION
- Applicant Address: JP Tokyo
- Assignee: HITACHI HIGH-TECH CORPORATION
- Current Assignee: HITACHI HIGH-TECH CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Mattingly & Malur, PC
- Priority: JPJP2018-160640 20180829
- International Application: PCT/JP2019/017442 WO 20190424
- International Announcement: WO2020/044658 WO 20200305
- Main IPC: G01J3/28
- IPC: G01J3/28 ; G02B5/18 ; G01J3/18 ; G02B27/00

Abstract:
The present invention provides a concave diffraction grating capable of improved diffraction efficiency by suppressing spherical aberration. The concave diffraction grating is a concave diffraction grating 2 for dispersing and focusing light and comprises sawtooth grating grooves 21 on a concave substrate 24, with the sawtooth grating grooves 21 being unequally spaced. The concave diffraction grating 2 for dispersing and focusing light is formed by preparing a planar diffraction grating with a sawtooth shape which is formed on a planar substrate by photo-lithography and etching or machining and which forms unequally spaced grating grooves 21, deforming and mounting the planar diffraction grating along a fixed convex substrate to obtain a mold of a concave diffraction grating, and transferring the mold of the concave diffraction grating to the surface of a metal or a resin.
Public/Granted literature
- US20210271008A1 CONCAVE DIFFRACTION GRATING, METHOD FOR PRODUCING THE SAME, AND OPTICAL DEVICE Public/Granted day:2021-09-02
Information query