Invention Grant
- Patent Title: Adaptive periodic waveform controller
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Application No.: US16905377Application Date: 2020-06-18
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Publication No.: US11367592B2Publication Date: 2022-06-21
- Inventor: Larry J. Fisk, II , Aaron T. Radomski , Jonathan W. Smyka
- Applicant: MKS Instruments, Inc.
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Agency: Harness, Dickey & Pierce, P.L.C.
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
A repeating setpoint generator module selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals. A closed-loop module, during a first one of the time intervals, generates N closed-loop values based on N differences between (i) N values of the setpoint at N times during the first one of the time intervals and (ii) N measurements of the output parameter at the N times during the first one of the time intervals, respectively. An adjusting module, during the first one of the time intervals, generates N adjustment values based on N differences between (i) N values of the setpoint at the N times during a second one of the time intervals and (ii) N measurements of the output parameter at the N times during the second one of the time intervals, respectively.
Public/Granted literature
- US20210013007A1 Adaptive Periodic Waveform Controller Public/Granted day:2021-01-14
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