Invention Grant
- Patent Title: Method, assembly, and apparatus for improved control of broadband radiation generation
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Application No.: US17128360Application Date: 2020-12-21
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Publication No.: US11372154B2Publication Date: 2022-06-28
- Inventor: Hendrik Sabert , Patrick Sebastian Uebel , Willem Richard Pongers
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Priority: EP20151863 20200115,EP20156804 20200212
- Main IPC: G02B6/02
- IPC: G02B6/02 ; G01B11/25

Abstract:
A hollow-core photonic crystal fiber (HC-PCF) assembly for converting input radiation to broadband radiation, the hollow core fiber assembly including: a micro-structured fiber with a hollow core extending along a length of the fiber from an input end configured to receive input radiation to an output end configured to output broadband radiation, wherein the hollow core of the fiber is configured to include a medium; and a density control system configured to control a density profile of the medium along at least a part of the length of the fiber to establish a desired zero dispersion wavelength profile along at least a part of the length of the fiber.
Public/Granted literature
- US20210215872A1 METHOD, ASSEMBLY, AND APPARATUS FOR IMPROVED CONTROL OF BROADBAND RADIATION GENERATION Public/Granted day:2021-07-15
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