• Patent Title: Method for manufacturing a film on a support having a non-flat surface
  • Application No.: US16759990
    Application Date: 2018-10-31
  • Publication No.: US11373897B2
    Publication Date: 2022-06-28
  • Inventor: Bruno GhyselenJean-Marc Bethoux
  • Applicant: Soitec
  • Applicant Address: FR Bernin
  • Assignee: Soitec
  • Current Assignee: Soitec
  • Current Assignee Address: FR Bernin
  • Agency: TraskBritt
  • Priority: FR1760270 20171031
  • International Application: PCT/EP2018/079797 WO 20181031
  • International Announcement: WO2019/086504 WO 20190509
  • Main IPC: H01L21/762
  • IPC: H01L21/762 H01L41/313
Method for manufacturing a film on a support having a non-flat surface
Abstract:
A method for manufacturing a film on a support having a non-flat surface comprises: providing a donor substrate having a non-flat surface, forming an embrittlement zone in the donor substrate so as to delimit the film to be transferred, forming the support by deposition on the non-flat surface of the film to be transferred, and detaching the donor substrate along the embrittlement zone, so as to transfer the film onto the support.
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