Invention Grant
- Patent Title: Method for manufacturing a film on a support having a non-flat surface
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Application No.: US16759990Application Date: 2018-10-31
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Publication No.: US11373897B2Publication Date: 2022-06-28
- Inventor: Bruno Ghyselen , Jean-Marc Bethoux
- Applicant: Soitec
- Applicant Address: FR Bernin
- Assignee: Soitec
- Current Assignee: Soitec
- Current Assignee Address: FR Bernin
- Agency: TraskBritt
- Priority: FR1760270 20171031
- International Application: PCT/EP2018/079797 WO 20181031
- International Announcement: WO2019/086504 WO 20190509
- Main IPC: H01L21/762
- IPC: H01L21/762 ; H01L41/313

Abstract:
A method for manufacturing a film on a support having a non-flat surface comprises: providing a donor substrate having a non-flat surface, forming an embrittlement zone in the donor substrate so as to delimit the film to be transferred, forming the support by deposition on the non-flat surface of the film to be transferred, and detaching the donor substrate along the embrittlement zone, so as to transfer the film onto the support.
Public/Granted literature
- US20200303242A1 METHOD FOR MANUFACTURING A FILM ON A SUPPORT HAVING A NON-FLAT SURFACE Public/Granted day:2020-09-24
Information query
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