- Patent Title: Door opener and substrate processing apparatus provided therewith
-
Application No.: US16827012Application Date: 2020-03-23
-
Publication No.: US11378337B2Publication Date: 2022-07-05
- Inventor: Jeroen Fluit
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Agency: Snell & Wilmer L.L.P.
- Main IPC: F27D1/18
- IPC: F27D1/18 ; F27D3/00 ; F27D3/12 ; E05F1/00 ; E06B7/22

Abstract:
The disclosure relates to a door opener to open a door of a cassette with substrates, the opener having a first wall to engage with the cassette and having a first opening to transfer the door and the substrates and a second wall opposite the first wall and having a second opening to transfer substrates. The door opener may have a closure device to hold the door of the cassette and having first and second sides and moveable in a chamber formed between the first and second wall. The opener may have a first actuator to move the closure device in a first direction from a first closing position where the first side closes against the first wall to a second closing position where the second side closes against the second wall, and from the second closing position to a transport position in between the first and second closing positions.
Public/Granted literature
- US20200309455A1 DOOR OPENER AND SUBSTRATE PROCESSING APPARATUS PROVIDED THEREWITH Public/Granted day:2020-10-01
Information query