Invention Grant
- Patent Title: Waveguide-confining layer with gain medium to emit subwavelength lasers, and method to form same
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Application No.: US16718329Application Date: 2019-12-18
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Publication No.: US11381053B2Publication Date: 2022-07-05
- Inventor: Yusheng Bian , Ajey Poovannummoottil Jacob
- Applicant: GLOBALFOUNDRIES U.S. Inc.
- Applicant Address: US CA Santa Clara
- Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Hoffman Warnick LLC
- Agent Francois Pagette
- Main IPC: H01S3/063
- IPC: H01S3/063 ; H01S3/16 ; H01S3/091

Abstract:
Embodiments of the disclosure provide a waveguide-confining layer, a photonic integrated circuit (PIC) die with embodiments of a waveguide-confining layer, and methods to form the same. The waveguide-confining layer may include an oxide layer over a buried insulator layer, a silicon-based optical confinement structure embedded within or positioned on the oxide layer, and first and second blocking layers over the oxide layer and separated from each other by a horizontal slot. The first and second blocking layers include a metal or an oxide. A gain medium is positioned on the oxide layer and within the horizontal slot between the first and second blocking layers, and has a lower refractive index than each of the first and second blocking layers. The gain medium is vertically aligned with the silicon-based optical confinement structure, and a portion of the oxide layer separates the gain medium from the silicon-based optical confinement structure.
Public/Granted literature
- US20210194201A1 WAVEGUIDE-CONFINING LAYER WITH GAIN MEDIUM TO EMIT SUBWAVELENGTH LASERS, AND METHOD TO FORM SAME Public/Granted day:2021-06-24
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