- 专利标题: Substrate alignment systems and related methods
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申请号: US16505949申请日: 2019-07-09
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公开(公告)号: US11387130B2公开(公告)日: 2022-07-12
- 发明人: Michael J. Seddon , Takashi Noma
- 申请人: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- 申请人地址: US AZ Phoenix
- 专利权人: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- 当前专利权人: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- 当前专利权人地址: US AZ Phoenix
- 代理机构: Adam R. Stephenson, LTD.
- 主分类号: H01L21/68
- IPC分类号: H01L21/68 ; H01L21/768 ; H01L21/78 ; H01L23/544
摘要:
Implementations of a method of making a plurality of alignment marks on a wafer may include: providing a wafer including an alignment feature on a first side of the wafer. The method may include aligning the wafer using a camera focused on the first side of the wafer. The wafer may be aligned using the alignment feature on the first side of the die. The wafer may also include creating a plurality of alignment marks on a second side of the wafer through lasering, sawing, or scribing.
公开/授权文献
- US20200243366A1 SUBSTRATE ALIGNMENT SYSTEMS AND RELATED METHODS 公开/授权日:2020-07-30
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