- 专利标题: Semiconductor device and method of manufacturing the same
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申请号: US17070012申请日: 2020-10-14
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公开(公告)号: US11387144B2公开(公告)日: 2022-07-12
- 发明人: Daeho Yoon , Daeseon Jeon , Jaeyoung Choi
- 申请人: Samsung Electronics Co., Ltd.
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 优先权: KR10-2017-0164435 20171201
- 主分类号: H01L21/768
- IPC分类号: H01L21/768 ; H01L27/02 ; H01L23/528 ; G06F30/394 ; G06F30/398
摘要:
Disclosed are semiconductor devices and methods of manufacturing the same. The method comprises providing a layout comprising a first group that includes first and second patterns and a second group that includes third and fourth patterns, examining a bridge risk region in the layout, biasing one end of at least one of the first and third patterns, and forming first to fourth conductive patterns by respectively using the first to fourth patterns of the layout. The one end of at least one of the first and third patterns are adjacent to the bridge risk region.
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