- 专利标题: Non-volatile memory (NVM) cell structure to increase reliability
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申请号: US17068924申请日: 2020-10-13
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公开(公告)号: US11387242B2公开(公告)日: 2022-07-12
- 发明人: Shih-Hsien Chen , Chun-Yao Ko , Felix Ying-Kit Tsui
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Eschweiler & Potashnik, LLC
- 主分类号: G11C16/04
- IPC分类号: G11C16/04 ; H01L27/11524 ; H01L27/11529 ; H01L29/66 ; H01L29/06 ; H01L29/788 ; H01L27/11531
摘要:
An integrated chip includes a first well region, second well region, and third well region disposed within a substrate. The second well region is laterally between the first and third well regions. An isolation structure is disposed within the substrate and laterally surrounds the first, second, and third well regions. A floating gate overlies the substrate and laterally extends from the first well region to the third well region. A dielectric structure is disposed under the floating gate. A bit line write region is disposed within the second well region and includes source/drain regions disposed on opposite sides of the floating gate. A bit line read region is disposed within the second well region, is laterally offset from the bit line write region by a non-zero distance, and includes source/drain regions disposed on the opposite sides of the floating gate.
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