Invention Grant
- Patent Title: Semiconductor device having nanosheet transistor and methods of fabrication thereof
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Application No.: US17027302Application Date: 2020-09-21
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Publication No.: US11387322B2Publication Date: 2022-07-12
- Inventor: Chih-Ching Wang , Wei-Yang Lee , Ming-Chang Wen , Jo-Tzu Hung , Wen-Hsing Hsieh , Kuan-Lun Cheng
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: NZ Carr Law Office PLLC
- Main IPC: H01L29/10
- IPC: H01L29/10 ; H01L29/423 ; H01L29/78 ; H01L29/66

Abstract:
Embodiments of the present disclosure provide semiconductor device structures having at least one T-shaped stacked nanosheet transistor to provide increased effective conductive area across the channel regions. In one embodiment, the semiconductor device structure includes a first channel layer formed of a first material, wherein the first channel layer has a first width, and a second channel layer formed of a second material different from the first material, wherein the second channel layer has a second width less than the first width, and the second channel layer is in contact with the first channel layer. The structure also includes a gate dielectric layer conformally disposed on the first channel layer and the second channel layer, and a gate electrode layer disposed on the gate dielectric layer.
Public/Granted literature
- US20220093743A1 SEMICONDUCTOR DEVICE HAVING NANOSHEET TRANSISTOR AND METHODS OF FABRICATION THEREOF Public/Granted day:2022-03-24
Information query
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