Invention Grant
- Patent Title: Encapsulation layers of thin film transistors
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Application No.: US16634517Application Date: 2017-09-27
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Publication No.: US11387366B2Publication Date: 2022-07-12
- Inventor: Abhishek A. Sharma , Van H. Le , Jack T. Kavalieros , Tahir Ghani , Gilbert Dewey , Shriram Shivaraman , Inanc Meric , Benjamin Chu-Kung
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- International Application: PCT/US2017/053842 WO 20170927
- International Announcement: WO2019/066824 WO 20190404
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L27/108 ; H01L27/24 ; H01L29/51 ; H01L29/66

Abstract:
Embodiments herein describe techniques for a semiconductor device, which may include a substrate, a metallic encapsulation layer above the substrate, and a gate electrode above the substrate and next to the metallic encapsulation layer. A channel layer may be above the metallic encapsulation layer and the gate electrode, where the channel layer may include a source area and a drain area. In addition, a source electrode may be coupled to the source area, and a drain electrode may be coupled to the drain area. Other embodiments may be described and/or claimed.
Public/Granted literature
- US20200343379A1 ENCAPSULATION LAYERS OF THIN FILM TRANSISTORS Public/Granted day:2020-10-29
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