Invention Grant
- Patent Title: Digital exposure control method and apparatus
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Application No.: US17199395Application Date: 2021-03-11
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Publication No.: US11409202B2Publication Date: 2022-08-09
- Inventor: Xinglong Luan , Fuqiang Li , Jing Feng , Zhichong Wang , Peng Liu , Guangcai Yuan , Xue Dong
- Applicant: BOE Technology Group Co., Ltd.
- Applicant Address: CN Beijing
- Assignee: BOE Technology Group Co., Ltd.
- Current Assignee: BOE Technology Group Co., Ltd.
- Current Assignee Address: CN Beijing
- Agency: Ling and Yang Intellectual Property
- Agent Ling Wu; Stephen Yang
- Priority: CN202010524964.1 20200610
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G02B26/08
Abstract:
Provided is a digital exposure control method, including: performing exposure of different types of functional areas of a substrate to be exposed through one or a plurality of full-page scans, wherein scan speeds for different types of functional areas of the substrate to be exposed are different.
Public/Granted literature
- US20210389682A1 Digital Exposure Control Method and Apparatus Public/Granted day:2021-12-16
Information query
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