Invention Grant
- Patent Title: Ion source with tubular cathode
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Application No.: US16923304Application Date: 2020-07-08
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Publication No.: US11424097B2Publication Date: 2022-08-23
- Inventor: Bon-Woong Koo , Svetlana Radovanov , Frank Sinclair , You Chia Li , Peter Ewing , Ajdin Sarajlic , Christopher A. Rowland , Nunzio Carbone
- Applicant: APPLIED Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED Materials, Inc.
- Current Assignee: APPLIED Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: KDB Firm PLLC
- Main IPC: H01J37/08
- IPC: H01J37/08 ; H01J37/317

Abstract:
Provided herein are approaches for increasing efficiency of ion sources. In some embodiments, an apparatus, such as an ion source, may include a chamber housing having a first end wall and a second end wall, and an extraction plate coupled to at least one of the first end wall and the second end wall. The extraction plate may include an extraction aperture. The apparatus may further include a tubular cathode extending between the first end wall and the second end wall.
Public/Granted literature
- US20200343071A1 ION SOURCE WITH TUBULAR CATHODE Public/Granted day:2020-10-29
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