- 专利标题: Semiconductor memory device and method of manufacturing the same
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申请号: US16898276申请日: 2020-06-10
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公开(公告)号: US11444092B2公开(公告)日: 2022-09-13
- 发明人: Sang Bum Lee
- 申请人: SK hynix Inc.
- 申请人地址: KR Icheon
- 专利权人: SK hynix Inc.
- 当前专利权人: SK hynix Inc.
- 当前专利权人地址: KR Icheon
- 优先权: KR10-2019-0126177 20191011
- 主分类号: H01L27/11551
- IPC分类号: H01L27/11551 ; H01L27/11519 ; H01L27/11578 ; H01L27/11565
摘要:
The present technology includes a semiconductor memory device and a method of manufacturing the same. The semiconductor memory device includes a first semiconductor layer, a cell stack and a peripheral stack each disposed on the first semiconductor layer, a first slit structure extending in a first direction and penetrating the cell stack and the peripheral stack, a penetration structure penetrating the peripheral stack and being spaced apart from the first slit structure, and a support structure penetrating the peripheral stack. The support structure includes first sidewall portions spaced apart from each other and a second sidewall portion connecting the first sidewall portions to each other, and the penetration structure is disposed between the first sidewall portions.
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