Invention Grant
- Patent Title: System and method for fabricating perovskite film for solar cell applications
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Application No.: US16230095Application Date: 2018-12-21
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Publication No.: US11447858B2Publication Date: 2022-09-20
- Inventor: Yabing Qi , Luis Katsuya Ono , Shenghao Wang
- Applicant: OKINAWA INSTITUTE OF SCIENCE AND TECHNOLOGY SCHOOL CORPORATION
- Applicant Address: JP Okinawa
- Assignee: OKINAWA INSTITUTE OF SCIENCE AND TECHNOLOGY SCHOOL CORPORATION
- Current Assignee: OKINAWA INSTITUTE OF SCIENCE AND TECHNOLOGY SCHOOL CORPORATION
- Current Assignee Address: JP Okinawa
- Agency: WHDA, LLP
- Main IPC: C23C14/24
- IPC: C23C14/24 ; C23C14/06 ; C23C14/54 ; H01L51/00 ; H01L51/44 ; H01L51/42

Abstract:
A system and method for fabricating perovskite films for solar cell applications are provided, the system including a housing for use as a vacuum chamber, a substrate stage coupled to the top section of the housing; a first evaporator unit coupled to the bottom section of the housing and configured to generate BX2 (metal halide material) vapor; a second evaporator unit coupled to the housing and configured to generate AX (organic material) vapor; and a flow control unit coupled to the housing for controlling circulation of the AX vapor. The dimensions of the horizontal cross-sectional shape of the first evaporator unit, the dimensions of the horizontal cross-sectional shape of the substrate stage, and the relative position in the horizontal direction between the two horizontal cross-sectional shapes are configured to maximize the overlap between the two horizontal cross-sectional shapes.
Public/Granted literature
- US20190218657A1 SYSTEM AND METHOD FOR FABRICATING PEROVSKITE FILM FOR SOLAR CELL APPLICATIONS Public/Granted day:2019-07-18
Information query
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