Invention Grant
- Patent Title: Optical maskless
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Application No.: US17258559Application Date: 2019-07-03
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Publication No.: US11448971B2Publication Date: 2022-09-20
- Inventor: Pieter Willem Herman De Jager
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Priority: EP18186826 20180801
- International Application: PCT/EP2019/067862 WO 20190703
- International Announcement: WO2020/025246 WO 20200206
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
A method includes illuminating a mirror array with light having light amplitudes forming a first greyscale pattern, the mirror array including a number of mirrors and at least two of the mirrors are illuminated with a same amplitude of the light. The method also includes imaging the light with the light amplitudes onto a substrate to create a second greyscale pattern, different than the first greyscale pattern, at the substrate.
Public/Granted literature
- US20210157245A1 OPTICAL MASKLESS Public/Granted day:2021-05-27
Information query
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