Invention Grant
- Patent Title: Plasma processing method
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Application No.: US16754402Application Date: 2018-09-26
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Publication No.: US11450512B2Publication Date: 2022-09-20
- Inventor: Shinya Iwashita , Takamichi Kikuchi , Naotaka Noro , Toshio Hasegawa , Tsuyoshi Moriya
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Nath, Goldberg & Meyer
- Agent Jerald L. Meyer; Tanya E. Harkins
- Priority: JPJP2017-196630 20171010
- International Application: PCT/JP2018/035654 WO 20180926
- International Announcement: WO2019/073798 WO 20190418
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01J37/20

Abstract:
A plasma processing method according to an embodiment is performed in a state in which a substrate is placed on a support stage in an internal space of a chamber body. In the plasma processing method, a plasma treatment is performed on the substrate. Subsequently, a phase of a voltage of a lower electrode is relatively adjusted with respect to a phase of a voltage of an upper electrode by a phase adjustment circuit, such that a thickness of a sheath between the support stage and plasma without extinguishing the plasma generated in order to perform the plasma treatment. Thereafter, in a state in which supply of a high-frequency power is stopped, gases and particles in the internal space of the chamber body are discharged using an exhaust device.
Public/Granted literature
- US20210142982A1 Plasma Processing Method Public/Granted day:2021-05-13
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