发明授权
- 专利标题: Package structure, package-on-package structure and manufacturing method thereof
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申请号: US17321525申请日: 2021-05-17
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公开(公告)号: US11456249B2公开(公告)日: 2022-09-27
- 发明人: Chuei-Tang Wang , Tin-Hao Kuo
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: JCIPRNET
- 主分类号: H01L21/48
- IPC分类号: H01L21/48 ; H01L21/56 ; H01L23/49 ; H01L23/52 ; H01L23/522 ; H01L23/00 ; H01L23/31 ; H01L23/498
摘要:
A package structure including an interposer, a semiconductor die, through insulator vias, an insulating encapsulant and a redistribution layer is provided. The interposer includes a core structure having a first and second surface, first metal layers disposed on the first and second surface, second metal layers disposed on the second surface over the first metal layers, and third metal layers disposed on the second surface over the second metal layers. The semiconductor die is disposed on the interposer. The through insulator vias are disposed on the interposer and electrically connected to the plurality of first metal layers. The insulating encapsulant is disposed on the interposer over the first surface and encapsulating the semiconductor die and the plurality of through insulator vias. The redistribution layer is disposed on the insulating encapsulant and electrically connected to the semiconductor die and the plurality of through insulator vias.
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