- 专利标题: Semiconductor memory device
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申请号: US16865988申请日: 2020-05-04
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公开(公告)号: US11456312B2公开(公告)日: 2022-09-27
- 发明人: Young Ock Hong
- 申请人: SK hynix Inc.
- 申请人地址: KR Icheon-si Gyeonggi-do
- 专利权人: SK hynix Inc.
- 当前专利权人: SK hynix Inc.
- 当前专利权人地址: KR Icheon-si Gyeonggi-do
- 代理机构: William Park & Associates Ltd.
- 优先权: KR10-2019-0120994 20190930
- 主分类号: H01L27/1158
- IPC分类号: H01L27/1158 ; H01L27/11573 ; H01L27/11565
摘要:
A semiconductor memory device includes a substrate including a peripheral circuit; an interconnection array disposed on the peripheral circuit; a cell stack structure disposed on the interconnection array, the cell stack structure including gate electrodes stacked in a vertical direction to form a cell step structure; and a dummy stack structure disposed on the interconnection array, the dummy stack structure including sacrificial layers stacked in the vertical direction to form a dummy step structure parallel to the cell step structure. The interconnection array includes a first lower conductive pattern including a center region overlapping with a slit between the cell step structure and the dummy step structure, a first region extending to overlap with the dummy step structure from the center region, and a second region extending to overlap with the cell step structure from the center region.
公开/授权文献
- US20210098476A1 SEMICONDUCTOR MEMORY DEVICE 公开/授权日:2021-04-01
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