Invention Grant
- Patent Title: Alignment mechanism, chuck device, and bonder
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Application No.: US16463847Application Date: 2017-11-14
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Publication No.: US11462428B2Publication Date: 2022-10-04
- Inventor: Masaaki Tanabe , Kosaku Saino
- Applicant: TAZMO CO., LTD.
- Applicant Address: JP Okayama
- Assignee: TAZMO CO., LTD.
- Current Assignee: TAZMO CO., LTD.
- Current Assignee Address: JP Okayama
- Agency: Renner, Otto, Boisselle & Sklar, LLP
- Priority: JPJP2016-232354 20161130
- International Application: PCT/JP2017/040885 WO 20171114
- International Announcement: WO2018/101025 WO 20180607
- Main IPC: H01L21/68
- IPC: H01L21/68 ; B65G47/91 ; H01L21/683 ; H01L23/00 ; F16H35/00

Abstract:
An alignment mechanism comprises a rotary unit 61 with a first rotary axis 61c, three power transmission mechanisms 62, and three alignment action units 63. Each power transmission mechanism 62 comprises a first arm 621 and a second arm 622. The first arm 621 includes a first end 621a pivotably supported at a corresponding one of three different positions P11 to P13, and a second end 621b on the opposite side of the first end 621a. The second arm 622 includes a second rotary axis 622c and is pivotably supported on the second end 621b of the first arm 621 at a position different from the second rotary axis 622c. The alignment action units 63 are connected to corresponding second arms. The second rotary axes 622c are at three positions P21 to P23 separated from the rotary unit 61 toward three different directions centered on the first rotary axis 61c.
Public/Granted literature
- US20190333798A1 ALIGNMENT MECHANISM, CHUCK DEVICE, AND BONDER Public/Granted day:2019-10-31
Information query
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