Invention Grant
- Patent Title: Semiconductor package including photo imageable dielectric and manufacturing method thereof
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Application No.: US17001992Application Date: 2020-08-25
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Publication No.: US11462487B2Publication Date: 2022-10-04
- Inventor: Yuseon Heo
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Lee IP Law, P.C.
- Priority: KR10-2020-0030545 20200312
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L23/31 ; H01L23/538 ; H01L21/48 ; H01L21/56 ; H01L21/683 ; H01L25/10

Abstract:
A semiconductor package includes a frame, a semiconductor chip, a through via, a connection pad, a lower redistribution layer on the bottom surfaces of the frame and the semiconductor chip, a connection terminal on the lower redistribution layer, an encapsulant covering the top surfaces of the frame and the semiconductor chip, and an upper redistribution layer on the encapsulant. The lower redistribution layer includes a lower insulating layer, a lower redistribution pattern, and an under-bump metal (UBM). The upper redistribution layer includes an upper insulating layer, an upper redistribution pattern, an upper via, and an upper connection pad. The lower insulating layer includes an inner insulating pattern surrounding the side surface of the UBM and an outer insulating pattern surrounding the side surface of the inner insulating pattern. The cyclization rate of the inner insulating pattern is higher than the cyclization rate of the outer insulating pattern.
Public/Granted literature
- US20210288000A1 SEMICONDUCTOR PACKAGE INCLUDING PHOTO IMAGEABLE DIELECTRIC AND MANUFACTURING METHOD THEREOF Public/Granted day:2021-09-16
Information query
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