- Patent Title: Three-dimensional memory devices and fabrication methods thereof
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Application No.: US17100869Application Date: 2020-11-21
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Publication No.: US11462565B2Publication Date: 2022-10-04
- Inventor: Li Hong Xiao
- Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Applicant Address: CN Wuhan
- Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee Address: CN Wuhan
- Agency: Bayes PLLC
- Priority: CN201910248585.1 20190329,CN201910248601.7 20190329,CN201910248617.8 20190329,CN201910248966.X 20190329,CN201910248967.4 20190329
- Main IPC: H01L27/00
- IPC: H01L27/00 ; H01L27/11582 ; H01L27/1157 ; H01L27/11556 ; H01L27/11524

Abstract:
Embodiments of a method for forming three-dimensional (3D) memory devices include the following operations. First, an initial channel hole is formed in a stack structure of a plurality first layers and a plurality of second layers alternatingly arranged over a substrate. An offset is formed between a side surface of each one of the plurality of first layers and a side surface of each one of the plurality of second layers on a sidewall of the initial channel hole to form a channel hole. A semiconductor channel is further formed by filling the channel hole with a channel-forming structure. The semiconductor channel may have a memory layer having a first memory portion surrounding a bottom of each second layer and a second memory portion connecting adjacent first memory portions. The first memory portion and the second memory portion may be staggered along a vertical direction.
Public/Granted literature
- US20210104547A1 THREE-DIMENSIONAL MEMORY DEVICES AND FABRICATION METHODS THEREOF Public/Granted day:2021-04-08
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